ICC讯(Xun) 随(Sui)着(Zhuo)人(Ren)工(Gong)智(Zhi)能(Neng)、(?)新(Xin)能(Neng)源(Yuan)汽(Qi)车(Che)、(?)物(Wu)联(Lian)网(Wang)等(Deng)新(Xin)兴(Xing)领(Ling)域(Yu)的(De)蓬(Peng)勃(Bo)推(Tui)进(Jin),(?)宽(Kuan)禁(Jin)带(Dai)半(Ban)导(Dao)体(Ti)材(Cai)料(Liao)—(?)—(?)尤(You)其(Qi)是(Shi)碳(Tan)化(Hua)硅(Gui)((?)SiC)(?)与(Yu)氮(Dan)化(Hua)镓(Jia)((?)GaN)(?)—(?)—(?)凭(Ping)借(Jie)其(Qi)卓(Zhuo)越(Yue)性(Xing)能(Neng)迎(Ying)来(Lai)了(Liao)迅(Xun)猛(Meng)的(De)发(Fa)展(Zhan)势(Shi)头(Tou)。(?)为(Wei)了(Liao)深(Shen)入(Ru)剖(Pou)析(Xi)并(Bing)精(Jing)确(Que)测(Ce)量(Liang)这(Zhe)些(Xie)先(Xian)进(Jin)器(Qi)件(Jian)的(De)各(Ge)项(Xiang)参(Can)数(Shu)及(Ji)特(Te)性(Xing),(?)进(Jin)而(?)提(Ti)升(Sheng)其(Qi)效(Xiao)率(Lu)与(Yu)可(Ke)靠(Kao)性(Xing),(?)联(Lian)讯(Xun)仪(Yi)器(Qi)最(Zui)新(Xin)推(Tui)出(Chu)了(Liao)10x24高(Gao)压(Ya)低(Di)漏(Lou)电(Dian)开(Kai)关(Guan)矩(Ju)阵(Zhen)—(?)—(?)RM1013-HV,(?)能(Neng)够(Gou)在(Zai)小(Xiao)于(Yu)300pA的(De)偏(Pian)置(Zhi)电(Dian)流(Liu)满(Man)足(Zu)3000V高(Gao)压(Ya)测(Ce)量(Liang),(?)完(Wan)成(Cheng)各(Ge)种(Zhong)高(Gao)精(Jing)度(Du)的(De)半(Ban)导(Dao)体(Ti)表(Biao)征(Zheng)测(Ce)试(Shi)。(?)
01,高(Gao)精(Jing)度(Du)自(Zi)动(Dong)测(Ce)量(Liang)
联(Lian)讯(Xun)仪(Yi)器(Qi)最(Zui)新(Xin)推(Tui)出(Chu)了(Liao)10x24高(Gao)压(Ya)低(Di)漏(Lou)电(Dian)开(Kai)关(Guan)矩(Ju)阵(Zhen)—(?)—(?)RM1013-HV,(?)能(Neng)够(Gou)在(Zai)小(Xiao)于(Yu)300pA的(De)偏(Pian)置(Zhi)电(Dian)流(Liu)满(Man)足(Zu)3000V高(Gao)压(Ya)测(Ce)量(Liang),(?)可(Ke)配(Pei)合(He)高(Gao)精(Jing)度(Du)SMU完(Wan)成(Cheng)各(Ge)种(Zhong)功(Gong)率(Lu)半(Ban)导(Dao)体(Ti)的(De)表(Biao)征(Zheng)测(Ce)试(Shi)。(?)
▲(?)RM1013-HV高(Gao)压(Ya)低(Di)泄(Xie)漏(Lou)开(Kai)关(Guan)矩(Ju)阵(Zhen)框(Kuang)图(Tu)
多(Duo)路(Lu)高(Gao)压(Ya)灵(Ling)活(Huo)测(Ce)量(Liang)
支(Zhi)持(Chi)2路(Lu)高(Gao)压(Ya)低(Di)泄(Xie)漏(Lou)电(Dian)流(Liu)通(Tong)道(Dao)输(Shu)入(Ru),(?)整(Zheng)机(Ji)支(Zhi)持(Chi)10路(Lu)输(Shu)入(Ru)和(He)24路(Lu)输(Shu)出(Chu),(?)提(Ti)高(Gao)参(Can)数(Shu)测(Ce)量(Liang)的(De)灵(Ling)活(Huo)性(Xing),(?)节(Jie)省(Sheng)成(Cheng)本(Ben)和(He)时(Shi)间(Jian),(?)可(Ke)配(Pei)合(He)HVSMU/SMU/CMU/DMM等(Deng)测(Ce)量(Liang)设(She)备(Bei)实(Shi)现(Xian)一(Yi)套(Tao)高(Gao)效(Xiao)的(De)半(Ban)导(Dao)体(Ti)参(Can)数(Shu)自(Zi)动(Dong)测(Ce)试(Shi)系(Xi)统(Tong)。(?)
高(Gao)压(Ya)低(Di)泄(Xie)漏(Lou)电(Dian)流(Liu)
矩(Ju)阵(Zhen)低(Di)泄(Xie)漏(Lou)电(Dian)流(Liu)小(Xiao)于(Yu)300pA@3000V((?)高(Gao)压(Ya)低(Di)泄(Xie)漏(Lou)电(Dian)流(Liu)通(Tong)道(Dao))(?),(?)可(Ke)配(Pei)合(He)高(Gao)精(Jing)度(Du)的(De)SMU ((?)如(Ru)S3030F等(Deng))(?)实(Shi)现(Xian)高(Gao)精(Jing)度(Du)自(Zi)动(Dong)测(Ce)量(Liang)。(?)
支(Zhi)持(Chi)快(Kuai)速(Su)测(Ce)量(Liang)
开(Kai)关(Guan)矩(Ju)阵(Zhen)电(Dian)流(Liu)建(Jian)立(Li)时(Shi)间(Jian)小(Xiao)于(Yu)10秒(Miao)((?)1V电(Dian)压(Ya)输(Shu)入(Ru)开(Kai)始(Shi)到(Dao)电(Dian)流(Liu)<300fA的(De)时(Shi)间(Jian))(?),(?)可(Ke)配(Pei)合(He)SMU
((?)如(Ru)S3030F,(?)S2016C等(Deng))(?)实(Shi)现(Xian)微(Wei)弱(Ruo)电(Dian)流(Liu)信(Xin)号(Hao)的(De)快(Kuai)速(Su)测(Ce)量(Liang)。(?)
高(Gao)继(Ji)电(Dian)器(Qi)触(Chu)点(Dian)寿(Shou)命(Ming)
开(Kai)关(Guan)矩(Ju)阵(Zhen)使(Shi)用(Yong)世(Shi)界(Jie)一(Yi)流(Liu)的(De)干(Gan)簧(Huang)管(Guan)制(Zhi)作(Zuo)的(De)继(Ji)电(Dian)器(Qi),(?)机(Ji)械(Xie)寿(Shou)命(Ming)最(Zui)高(Gao)可(Ke)达(Da)10^8次(Ci)。(?)
10MHz带(Dai)宽(Kuan)
开(Kai)关(Guan)矩(Ju)阵(Zhen)优(You)化(Hua)了(Liao)C-V和(He)DMM通(Tong)道(Dao)的(De)传(Chuan)输(Shu)带(Dai)宽(Kuan),(?)满(Man)足(Zu)高(Gao)速(Su)测(Ce)试(Shi)的(De)需(Xu)求(Qiu)。(?)
控(Kong)制(Zhi)连(Lian)接(Jie)
支(Zhi)持(Chi)通(Tong)过(Guo)USB线(Xian)缆(Lan)或(Huo)LAN直(Zhi)接(Jie)连(Lian)接(Jie)至(Zhi)RM1013-HV,(?)实(Shi)现(Xian)通(Tong)道(Dao)闭(Bi)合(He)断(Duan)开(Kai)的(De)控(Kong)制(Zhi)
可(Ke)以(Yi)通(Tong)过(Guo)编(Bian)程(Cheng)(SCPI 指(Zhi)令(Ling))或(Huo)GUI界(Jie)面(Mian)控(Kong)制(Zhi)。(?)界(Jie)面(Mian)GUI非(Fei)常(Chang)直(Zhi)观(Guan)和(He)简(Jian)洁(Jie),(?)可(Ke)轻(Qing)松(Song)配(Pei)置(Zhi)通(Tong)道(Dao)的(De)闭(Bi)合(He)、(?)断(Duan)开(Kai)进(Jin)行(Xing)测(Ce)量(Liang)。(?)
▲(?)矩(Ju)阵(Zhen)控(Kong)制(Zhi)软(Ruan)件(Jian)GUI
02,通(Tong)道(Dao)配(Pei)置(Zhi)
03,(?)典(Dian)型(Xing)应(Ying)用(Yong)场(Chang)景(Jing)
功(Gong)率(Lu)半(Ban)导(Dao)体(Ti)参(Can)数(Shu)测(Ce)试(Shi)
使(Shi)用(Yong)高(Gao)压(Ya)低(Di)漏(Lou)电(Dian)开(Kai)关(Guan)矩(Ju)阵(Zhen)可(Ke)以(Yi)与(Yu)源(Yuan)表(Biao)/高(Gao)压(Ya)源(Yuan)表(Biao)/LCR
meter/数(Shu)字(Zi)万(Wan)用(Yong)表(Biao)等(Deng)仪(Yi)表(Biao)无(Wu)缝(Feng)集(Ji)成(Cheng),(?)组(Zu)成(Cheng)强(Qiang)大(Da)的(De)功(Gong)率(Lu)器(Qi)件(Jian)I-V、(?)C-V参(Can)数(Shu)自(Zi)动(Dong)化(Hua)测(Ce)试(Shi)系(Xi)统(Tong)。(?)可(Ke)以(Yi)高(Gao)效(Xiao)测(Ce)量(Liang)MOSFET/IGBT/BJT/Diode/电(Dian)容(Rong)/电(Dian)阻(Zu)等(Deng)器(Qi)件(Jian)的(De)I-V、(?)C-V各(Ge)项(Xiang)特(Te)征(Zheng)参(Can)数(Shu),(?)例(Li)如(Ru)MOSFET
的(De)BVdss、(?)Off-leak/Id(off)-Vds、(?) Id-Vds等(Deng)。(?)不(Bu)同(Tong)器(Qi)件(Jian)及(Ji)不(Bu)同(Tong)测(Ce)量(Liang)项(Xiang)目(Mu)之(Zhi)间(Jian)通(Tong)过(Guo)编(Bian)程(Cheng)控(Kong)制(Zhi)自(Zi)动(Dong)进(Jin)行(Xing)连(Lian)接(Jie)路(Lu)径(Jing)切(Qie)换(Huan),(?)一(Yi)站(Zhan)式(Shi)完(Wan)成(Cheng)测(Ce)量(Liang)。(?)
▲(?)矩(Ju)阵(Zhen)路(Lu)径(Jing)切(Qie)换(Huan)示(Shi)意(Yi)图(Tu)
在(Zai)半(Ban)导(Dao)体(Ti)功(Gong)率(Lu)器(Qi)件(Jian)测(Ce)试(Shi)中(Zhong)通(Tong)常(Chang)需(Xu)要(Yao)测(Ce)量(Liang)Ciss/Coss/Crss等(Deng)高(Gao)压(Ya)电(Dian)容(Rong)参(Can)数(Shu)。(?)高(Gao)压(Ya)电(Dian)容(Rong)测(Ce)量(Liang)与(Yu)I-V测(Ce)量(Liang)之(Zhi)间(Jian)的(De)路(Lu)径(Jing)切(Qie)换(Huan)一(Yi)直(Zhi)是(Shi)测(Ce)试(Shi)中(Zhong)的(De)难(Nan)点(Dian),(?)高(Gao)压(Ya)切(Qie)换(Huan)矩(Ju)阵(Zhen)中(Zhong)内(Nei)置(Zhi)了(Liao)可(Ke)切(Qie)换(Huan)的(De)高(Gao)压(Ya)电(Dian)容(Rong)测(Ce)量(Liang)偏(Pian)置(Zhi)电(Dian)路(Lu)(HV
Bias Tee),(?)可(Ke)以(Yi)有(You)效(Xiao)地(Di)解(Jie)决(Jue)这(Zhe)个(Ge)问(Wen)题(Ti)。(?)
▲(?)SiC MOSFET 电(Dian)容(Rong)特(Te)性(Xing)
▲(?)电(Dian)容(Rong)等(Deng)效(Xiao)模(Mo)型(Xing)